Frontiers of Optoelectronics, Volume. 7, Issue 1, 69(2014)

Simulation analysis of combined UV/blue photodetector in CMOS process by technology computer-aided design

Changping CHEN1, Xiangliang JIN1、*, Lizhen TANG1, Hongjiao YANG1, and Jun LUO2
Author Affiliations
  • 1Faculty of Materials, Optoelectronics and Physics, Xiangtan University, Xiangtan 411105, China
  • 2Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200444, China
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    A composite ultraviolet (UV)/blue photodetector structure has been proposed, which is composed of P-type silicon substrate, Pwell, Nwell and N-channel metaloxide-semiconductor field-effect transistor (NMOSFET) realized in the Pwell. In this photodetector, lateral ringshaped Pwell-Nwell junction was used to separate the photogenerated carriers, and non-equilibrium excess hole was injected to the Pwell bulk for changing the bulk potential and shifting the NMOSFET’s threshold voltage as well as the output drain current. By technology computer-aided design (TCAD) device, simulation and analysis of this proposed photodetector were carried out. Simulation results show that the combined photodetector has enhanced responsivity to UV/blue spectrum. Moreover, it exhibits very high sensitivity to weak and especially ultral-weak optical light. A sensitivity of 7000 A/W was obtained when an incident optical power of 0.01 μW was illuminated to the photodetector, which is 35000 times higher than the responsivity of a conventional silicon-based UV photodiode (usually is about 0.2 A/W). As a result, this proposed combined photodetector has great potential values for UV applications.

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    Changping CHEN, Xiangliang JIN, Lizhen TANG, Hongjiao YANG, Jun LUO. Simulation analysis of combined UV/blue photodetector in CMOS process by technology computer-aided design[J]. Frontiers of Optoelectronics, 2014, 7(1): 69

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    Paper Information

    Received: Aug. 25, 2013

    Accepted: Sep. 30, 2013

    Published Online: Jul. 10, 2014

    The Author Email: Xiangliang JIN (jinxl@xtu.edu.cn)

    DOI:10.1007/s12200-013-0375-1

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