Frontiers of Optoelectronics, Volume. 7, Issue 1, 69(2014)
Simulation analysis of combined UV/blue photodetector in CMOS process by technology computer-aided design
A composite ultraviolet (UV)/blue photodetector structure has been proposed, which is composed of P-type silicon substrate, Pwell, Nwell and N-channel metaloxide-semiconductor field-effect transistor (NMOSFET) realized in the Pwell. In this photodetector, lateral ringshaped Pwell-Nwell junction was used to separate the photogenerated carriers, and non-equilibrium excess hole was injected to the Pwell bulk for changing the bulk potential and shifting the NMOSFET’s threshold voltage as well as the output drain current. By technology computer-aided design (TCAD) device, simulation and analysis of this proposed photodetector were carried out. Simulation results show that the combined photodetector has enhanced responsivity to UV/blue spectrum. Moreover, it exhibits very high sensitivity to weak and especially ultral-weak optical light. A sensitivity of 7000 A/W was obtained when an incident optical power of 0.01 μW was illuminated to the photodetector, which is 35000 times higher than the responsivity of a conventional silicon-based UV photodiode (usually is about 0.2 A/W). As a result, this proposed combined photodetector has great potential values for UV applications.
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Changping CHEN, Xiangliang JIN, Lizhen TANG, Hongjiao YANG, Jun LUO. Simulation analysis of combined UV/blue photodetector in CMOS process by technology computer-aided design[J]. Frontiers of Optoelectronics, 2014, 7(1): 69
Received: Aug. 25, 2013
Accepted: Sep. 30, 2013
Published Online: Jul. 10, 2014
The Author Email: Xiangliang JIN (jinxl@xtu.edu.cn)