Lithium niobate crystals have excellent electro-optic, acousto-optic and nonlinear optical properties, and have broad transmission window. As an important optical material, it is widely used in the fields of communication and sensing. Single-crystal lithium niobate thin film (lithium niobate on insulator, LNOI) prepared by ion implantation and direct bonding retains the excellent physical properties of lithium niobate bulk material, and it has large refractive index contrast. Photonic devices based on this material have been greatly improved in terms of integration and device performance. The preparation process and applications of LNOI is introduced in this paper, and a 6-inch LNOI is demonstrated. A hybrid thin film can be formed by covering a single-crystal silicon thin film on the top of a LNOI. This hybrid thin film combines the excellent optical properties of LN and excellent electronic properties of silicon. 3-inch hybrid thin film is reported in this paper. X-ray diffraction shows that the silicon thin film is single-crystal. This hybrid material will have potential applications in the future integrated optoelectronic chips.