Chinese Optics Letters, Volume. 10, Issue 9, 090501(2012)

Fabrication and characterization of sliced multilayer transmission grating for X-ray region

Qiushi Huang, Haochuan Li, Jingtao Zhu, Xiaoqiang Wang, Zhanshan Wang, Lingyan Chen, and Yongjian Tang

To develop high quality dispersion optics in the X-ray region, the sliced multilayer transmission grating is examined. Dynamical diffraction theory is used to calculate the diffraction property of this volume grating. A WSi2/Si multilayer with a d-spacing of 14.3 nm and bi-layer number of 300 is deposited on a superpolished silicon substrate by direct current magnetron sputtering technology. To make the transmission grating, the multilayer is sliced and thinned in the cross-section direction to a depth of 23–25 \mu m. The diffraction efficiency of the grating is measured at E = 8.05 keV, and the 1st-order efficiency is 19%. The sliced multilayer grating with large aspect ratio and nanometer period can be used for high efficiency and high dispersion optics in the X-ray region.

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Qiushi Huang, Haochuan Li, Jingtao Zhu, Xiaoqiang Wang, Zhanshan Wang, Lingyan Chen, Yongjian Tang, "Fabrication and characterization of sliced multilayer transmission grating for X-ray region," Chin. Opt. Lett. 10, 090501 (2012)

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Received: Feb. 15, 2012

Accepted: Mar. 14, 2012

Published Online: May. 16, 2012

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DOI:10.3788/col201210.090501

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