For piezoelectric ceramic fast steering mirror, a transfer function identification method based on frequency domain analysis is designed, which can realize frequency sweeping and transfer function fitting for any system with known transfer function order. Then the fitted transfer function of piezoelectric fast steering mirror is used for controller design, simulation, and physical verification. The closed-loop performance of the designed controller is verified, which achieves a bandwidth of 600 Hz and a step response time of 12 ms.The results show that the controller meets the performance requirements.The equipment will be affected by temperature drift during operation, therefore the relationship between temperature, optical deflection angle and control voltage is used for temperature compensation. The experimental results show that the temperature compensation function can suppress the temperature drift by 90%, which greatly improves the system control accuracy.