Chinese Journal of Lasers, Volume. 30, Issue 2, 120(2003)
Experimental study on RF-discharged plasma characteristics in Au and Cu ion Laser
The discharge plasma characteristics of the RF sputtered Cu and Au in He gas are investigated. The sheath thickness and the real and imaginary part of the plasma impedance are obtained.In addition, on the basis of Gadyak′s RF discharge model, the electron density in the discharge plasma is calculated for different pressure and current density.
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[in Chinese], [in Chinese], [in Chinese], D.Teuner. Experimental study on RF-discharged plasma characteristics in Au and Cu ion Laser[J]. Chinese Journal of Lasers, 2003, 30(2): 120
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