Chinese Journal of Lasers, Volume. 10, Issue 5, 277(1983)
Investigation on semiconductor Si doping by laser irradiation
A method is described for semiconductor Si doping of organic colloidal dopants. Both P-type and N-type crystalline Si have been doped using arsenic, phosphor and boron. The electrical and opto-electrical characteristics of the doping area are investigated.
Get Citation
Copy Citation Text
Du Yuancheng, Sun Diechi, Zhao Yancheng, Li Fuming. Investigation on semiconductor Si doping by laser irradiation[J]. Chinese Journal of Lasers, 1983, 10(5): 277
Category: laser devices and laser physics
Received: Sep. 13, 1982
Accepted: --
Published Online: Aug. 31, 2012
The Author Email:
CSTR:32186.14.