Bulk Effects in Hyper-Numerical Aperture Optical Lithography

Acta Optica Sinica, Volume. 28, Issue 6, 1091(2008)

Zhou Yuan^1,2、* and Li Yanqiu³

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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Zhou Yuan, Li Yanqiu. Bulk Effects in Hyper-Numerical Aperture Optical Lithography[J]. Acta Optica Sinica, 2008, 28(6): 1091

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Paper Information

Category: Imaging Systems

Received: Oct. 10, 2007

Accepted: --

Published Online: Jun. 6, 2008

The Author Email: Yuan Zhou (zhouyuan@mail.iee.ac.cn)

DOI:

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