Double laser beams deposition method for preparing doped thin film is designed. An excimer nanosecond laser and a femtosecond laser are used to ablate the graphite and germanium targets, respectively. The laser parameters of the excimer nanosecond laser keeps unchanged, and the repetition frequency of the femtosecond laser changes from 0 to 500 Hz. Then the Ge-doped diamond-like carbon films with increased germanium concentration are prepared. The results of tests show that, with the improvement of germanium content, the refractive index of the Ge-doped diamond-like carbon film increases slightly, and the extinction coefficient increases 7.3 times. The surface-hardness of the films decreases by 41.3% linearly, while the inner-stress in the films reduces by 78.1% nonlinearly and tend to a steady value. The results of the fastness test show that the increasing of the germanium content can enhance the adhesion of the films on the germanium substrates, but reduce their corrupt-resistant against the circumstance. Because of the strong expansibility of the research method, the research results can not only offer the experiment base for the designs of doped diamond-like carbon films or multiple doped diamond-like carbon films in different fields, but also offer a new means of preparing other doped films for different purposes.