The processing of laser precision cutting quarts glass has been researched, the processing effects influenced by different parameters have been discussed. Use a 1.064 μm picosecond laser as light source, scribe cutting the JGS1-1 quartz glass which thickness is 0.4mm. Under the striping speed 700 mm/s, We get sample which obverse side edge collapse 11.08 μm, back side edge collapse 7.610 μm and side roughness 4um. Combined with the actual machining requirements, the influence of the light source, duty cycle, the point pitch and the focusing spot have been analyzed by using the control variable method and the best parameters have been given.