Chinese Journal of Lasers, Volume. 22, Issue 6, 465(1995)

The Fabrication and Test of Multilayer Mirrors for Soft X-ray Lasers

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less

    The fabrication and test of multilayer mirrors for soft X-ray lasers are reported.The substrates, coating machine, film thickness controlling methods, and conditions in deposition process are described. The periodic structure of the multilayers is evaluated by Xray diffraction, and using a reflectometer with a laser produced plasma source the reflectance of the multilayers is tested. These multilayer mirrors have been employed in double passing experiments of soft X-ray lasers.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Fabrication and Test of Multilayer Mirrors for Soft X-ray Lasers[J]. Chinese Journal of Lasers, 1995, 22(6): 465

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: materials and thin films

    Received: Jul. 11, 1994

    Accepted: --

    Published Online: Aug. 17, 2007

    The Author Email:

    DOI:

    Topics