Chinese Journal of Lasers, Volume. 22, Issue 6, 465(1995)
The Fabrication and Test of Multilayer Mirrors for Soft X-ray Lasers
The fabrication and test of multilayer mirrors for soft X-ray lasers are reported.The substrates, coating machine, film thickness controlling methods, and conditions in deposition process are described. The periodic structure of the multilayers is evaluated by Xray diffraction, and using a reflectometer with a laser produced plasma source the reflectance of the multilayers is tested. These multilayer mirrors have been employed in double passing experiments of soft X-ray lasers.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Fabrication and Test of Multilayer Mirrors for Soft X-ray Lasers[J]. Chinese Journal of Lasers, 1995, 22(6): 465