Organic-inorganic hybrid optical waveguide materials were prepared by non-hydrolytic sol-gel process, using diphenylsilanediol (DPSD) and gamma-glycidoxypropyltrimethoxysilane (GPTS) as precursors. The planar optical waveguide films were deposited on silica glass substrates by spin-coating. Refractive index, optical absorption or transmittance of hybrid films was measured with an Abbe refractometer and ultraviolet-visible-near infrared spectrometer, respectively. The structure characteristic of the films was discussed with their Raman and infrared spectra which measured with Fourier infrared spectrometer and Raman spectrometer. Optical propagation loss of hybrid film at length of 632.8 nm was measured by using of the prism coupled method. The results show that refractive index of the films could be adjusted by controlling the content of DPSD (1.461~1.481). Light transmittances of the hybrid materials are approximately 90% in the visible and near infrared range. Optical propagation loss of hybrid film is about 0.26 dB/cm.