Journal of Synthetic Crystals, Volume. 54, Issue 2, 337(2025)

Performance Optimization Study of Ga2O3/NiOx Schottky Barrier Diodes

WANG Kaikai, DU Song, XU Hao, and LONG Hao*
Author Affiliations
  • School of Electronic Science and Engineering (National Model Microelectronics College), Xiamen University, Xiamen 361005, China
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    Due to the absence of p-type gallium oxide (Ga2O3), p-type nickel oxide (p-NiOx) was commonly employed in Ga2O3 Schottky barrier diode (SBD), which typically utilized either junction termination extension (JTE) or hetero-junction barrier Schottky (HJBS) structure. However, the influence of the NiOx on device performance has been insufficiently explored. In this work, the effects of NiOx in JTE and HJBS were investigated by Sentaurus TCAD. In JTE structure, breakdown voltage (BV) presented positive correlation with NiOx doping concentration and negative correlation with the NiOx tilt angle. In HJBS structure, BV increased with the width and depth of the NiOx field ring (FR), while decreased with the spacing between the FR and the anode edge. The optimal configuration was identified, consisting of 10° tilt angle and doping concentration of 3×1019 cm-3 for the NiOx JTE, as well as NiOx rings of 5 μm width, 1.5 μm depth, and 1 μm spacing for NiOx HJBS. This configuration achieved the BV of 4.52 kV, specific on-resistance (Ron,sp) of 5.68 mΩ·cm2 and performance figure of merit (PFOM) value of 3.57 GW/cm2, representing enhancements of 113% in BV and 132% in PFOM compared to experimental reports. This study contributed a design approach for vertical Ga2O3 SBD utilizing NiOx JTE and HJBS structures, enhancing BV and PFOM in SBD.

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    WANG Kaikai, DU Song, XU Hao, LONG Hao. Performance Optimization Study of Ga2O3/NiOx Schottky Barrier Diodes[J]. Journal of Synthetic Crystals, 2025, 54(2): 337

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    Paper Information

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    Received: Nov. 22, 2024

    Accepted: Mar. 31, 2025

    Published Online: Mar. 31, 2025

    The Author Email: LONG Hao (longhao@xmu.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0294

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