A closed cylindrical micro inertial impact piezoelectric motor structure is designed to meet the requirements of linear micro feed drive motor for precision instruments and micro devices, and the feasibility of the operating principle of the motor is verified. A prototype motor is fabricated and tested experimentally. The results show that when the preload is 0.25 N, the peak-peak value of the sawtooth voltage of the driving signal is 50 V, and the frequency is 500 Hz, the maximum speed of the no-load output of the motor is 6.19 mm/s, and the step resolution is 12 μm; When the preload is 0.5 N, the peak-peak value of the driving signal voltage is 50 V, and the frequency is 500 Hz, the maximum load force is 20 g.