Chinese Journal of Lasers, Volume. 17, Issue s1, 12(1990)
Parametric research on X-ray preionized KrF excimer lasers
In the UV preionized excimer laser, the output energy of KrF laser is generally greater than that of the XeCl laser. Whereas the output energy of KrF laser is smaller than that of the XeCl laser with x-ray preionization. This results are explained by parametric research and kinetic analysis of the laser.
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Lou Qihong, Dong Jinxing, Wei Yunrong, Ding Ze’an, Huo Yunsheng. Parametric research on X-ray preionized KrF excimer lasers[J]. Chinese Journal of Lasers, 1990, 17(s1): 12
Paper Information
Category: Laser physics
Received: Mar. 15, 1989
Accepted: --
Published Online: Oct. 12, 2012
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CSTR:32186.14.
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