Frontiers of Optoelectronics, Volume. 8, Issue 4, 402(2015)

Error compensation for three-dimensional profile measurement system

Xu YE1, Haobo CHENG1、*, Zhichao DONG1, and Hon-Yuen TAM2
Author Affiliations
  • 1School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
  • 2Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China
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    Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2l.

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    Xu YE, Haobo CHENG, Zhichao DONG, Hon-Yuen TAM. Error compensation for three-dimensional profile measurement system[J]. Frontiers of Optoelectronics, 2015, 8(4): 402

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    Paper Information

    Category: RESEARCH ARTICLE

    Received: Dec. 5, 2014

    Accepted: Apr. 9, 2015

    Published Online: Jan. 6, 2016

    The Author Email: Haobo CHENG (chenghaobo@tsinghua.org.cn)

    DOI:10.1007/s12200-015-0497-8

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