Chinese Optics Letters, Volume. 2, Issue 7, 07426(2004)
Fabrication and characterization of two-dimensional pin-cushion position sensitive detectors
In this paper, the fabrication and testing results of a two-dimensional pin-cushion position sensitive detector (PSD) are presented. The obtained pin-cushion PSD with an 8 * 8 mm2 effective area presents a maximum spectral response of 0.5 mA/mW at 850-nm wavelength, a 12-nA dark current at 5-V reverse voltage, a reverse breakdown voltage of 50 V, a nonlinearity of 2.175%, and a spatial resolution of 10 um. The spatial resolution is relatively low and the slight pin-cushion concave distortion is generated due to the incompletely satisfied relationship between sheet resistivity of the anode and the resistance per unit length.
Get Citation
Copy Citation Text
Dongyan Chen, Bin Lin, Yuqing Chen, "Fabrication and characterization of two-dimensional pin-cushion position sensitive detectors," Chin. Opt. Lett. 2, 07426 (2004)