A Raman spectrum of carbon nitride thin film is reported in this paper. There are two Raman peaks of 1400 cm-1 and 1370 cm-1 existed in the Raman spectrum, which is different structure comparing with Raman spectra of all known carbon based materials and carbon nitride. According to X-ray diffraction analysis (XRD) and surface morphology of the film taken by scanning electron microscopy (SEM), the nitrogen containing carbon thin film could be considered to have nano-scale graphite structure with buckling of the basal planes. The Raman peak of 1400 cm1 corresponds to C-C vibration in the basal planes. The other peak of 1370 cm 1 is attributed to disordered structure in long range. The sample of carbon nitride thin film was prepared by using macro wave plasma chemical vapor deposition (MPCVD) system.