Chinese Journal of Lasers, Volume. 36, Issue 8, 1946(2009)
Fabrication of New Structure Vertical-Cavity Surface-Emitting Laser
Using radiate bridge channels in place of ring channels for current injection, a new radiate bridge structure vertical cavity surface emitting laser (VCSEL) was fabricated in order to improve the thermal characteristic and its photo-electricity. The study on the new structure shows that the radiate bridge structure can reduce the electric and thermal resistance of VCSEL, and improve the device modes. The radiate bridge structure and the traditional structure VCSEL are made using the same process on the same wafer, and their performance are tested contrastively. The results show that the differential resistance of new structure VCSEL is 25% lower and the out power is 1.6 times higher than the traditional structure VCSEL. The characteristic of temperatures and modes is good, it can still operate at 80 ℃,the maximum output power can reach 17 mW at 60 ℃, and its thermal resistance is 1.95 ℃/mW. It operates with single mode all along, its performance is much better than traditional structure VCSEL.
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Zhao Yingjie, Hao Yongqin, Li Guangjun, Feng Yuan, Hou Lifeng. Fabrication of New Structure Vertical-Cavity Surface-Emitting Laser[J]. Chinese Journal of Lasers, 2009, 36(8): 1946