A compact 41×41 arrayed waveguide grating (AWG) device with double active layers is fabricated by using SU-8 minus negative core whose type is ultraviolet (UV) light-sensitive type and organic-inorganic hybrid material cladding. A rectangular waveguide structure is selected in the calculation of AWG and the single mode can be achieved with cladding thickness of 5 μm and the core cross sectional area of 4 μm×4 μm. For the AWG device, the channel space is set as 0.8 nm with the central wavelength of 1550 nm. After testing, the transmission loss is 1.2 dB/cm, the diffraction loss of the central channel is 6.2 dB, the tested channel space is 0.793 nm and the central wavelength shift is -0.08 nm/℃.