Infrared and Laser Engineering, Volume. 44, Issue 8, 2406(2015)
Compensation and identification of non-common path error in lateral shearing interferometry
Because standard reference wave-front is not needed in lateral shearing interferometry(LSI), interferometry cavity can be shorten, even absolute common path interferometry could be achieved, and it is immunity to air turbulence and vibration. Therefore, non-common path error between two shearing wave-fronts which come through different cubic prisms, shear plate and pentaprism is not avoided. In this paper, calculation method of non-common path error was proposed by contrast analysis between adjustment error and non-common path error in shearing interferometry, and non-common path error in surface measurement result was compensated. Lastly, experiment results demonstrate the surface result after compensation is in accordance with ZYGO interferometer.
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Liu Bingcai, Li Bing, Tian Ailing, Gao Fen. Compensation and identification of non-common path error in lateral shearing interferometry[J]. Infrared and Laser Engineering, 2015, 44(8): 2406
Category: 光电测量
Received: Dec. 20, 2014
Accepted: Jan. 13, 2015
Published Online: Jan. 26, 2016
The Author Email: Bingcai Liu (liubingcai@xatu.edu.cn)
CSTR:32186.14.