Planar optical waveguides were fabricated by copper ion-exchange on BK7 glass substrate. The effective refractive index was measured by prism-coupling technique at the wavelength of 632.8 nm. Refractive index profile was determined by Inverse-WKB method. The results showed that the best fitting to the index profile was improved Gauss function, and the index profile appeared to be a buried waveguide′s index profile. The diffused coefficient of copper ion-exchange at 570℃ was obtained as De≈1.2133×10-14 m2/s. At the same time, the BK7 ion-exchanged glass samples were determined by electron microscope scan (EMS) and secondary ion mass spectroscopy (SIMS) measurements, the copper ions concentration in the BK7 glass waveguides′ surface was gotten. It could be shown that the BK7 glass planar waveguides were buried waveguides. The fabricated BK7 buried glass was obtained by single step copper ion exechange.