Chinese Optics Letters, Volume. 3, Issue 2, 02107(2005)

Near-field lithography on the azobenzene polymer liquid crystal films

Douguo Zhang1、*, Pei Wang1, Yonghua Lu1, Ming Bai1, Jun Yang1, Lin Tang1, Jiangying Zhang1, Hai Ming1, Qijin Zhang2, Jian Liu2, Zebo Zhang3, Li Cao3, and Anlian Pan3
Author Affiliations
  • 1Department of Physics, University of Science and Technology of China, Hefei 230026
  • 2Department of Polymer Science and Engineering, University of Science and Technology of China, Hefei 230026
  • 3Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Science, Beijing 100080
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    In this article, we reported near-field research on azobenzene polymer liquid crystal films using scanning near-field optical microscopy (SNOM). Optical writing and subsequently topographic reading of the patterns with subwavelength resolution were carried out in our experiments. Nanometer scale dots and lines were successfully fabricated on the films and the smallest dot diameter is about 120 nm. The width of the line fabricated is about 250 nm. This method is also a choice for nanolithography. The mechanism of the surface deformation on the polymer films was briefly analyzed from the viewpoint of gradient force in the optical near field. The intensity distribution of the electric field near the tip aperture was numerically simulated using finite-difference time-domain (FDTD) method and the numerical simulation results were consistent with the experimental results.

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    Douguo Zhang, Pei Wang, Yonghua Lu, Ming Bai, Jun Yang, Lin Tang, Jiangying Zhang, Hai Ming, Qijin Zhang, Jian Liu, Zebo Zhang, Li Cao, Anlian Pan, "Near-field lithography on the azobenzene polymer liquid crystal films," Chin. Opt. Lett. 3, 02107 (2005)

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    Paper Information

    Category: Microscopy

    Received: Jul. 5, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

    The Author Email: Douguo Zhang (dgzhang@ustc.edu)

    DOI:

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