International Journal of Extreme Manufacturing, Volume. 3, Issue 2, 25103(2021)

Theoretical and experimental investigation of chemical mechanical polishing of W–Ni–Fe alloy

Jiang Guo1, Xiaolin Shi1, Chuanping Song1, Lin Niu1, Hailong Cui1, Xiaoguang Guo1, Zhen Tong2, Nan Yu3, Zhuji Jin1, and Renke Kang1、*
Author Affiliations
  • 1Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, People’s Republic of China
  • 2EPSRC Hub in Future Metrology, Centre for Precision Technologies, University of Huddersfield, Huddersfield, United Kingdom
  • 3Institute for Materials and Processes, School of Engineering, Sanderson Building, University of Edinburgh, EH9 3FB Scotland, United Kingdom
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    Fine finishing of tungsten alloy is required to improve the surface quality of molds and precision instruments. Nevertheless, it is difficult to obtain high-quality surfaces as a result of grain boundary steps attributed to differences in properties of two-phase microstructures. This paper presents a theoretical and experimental investigation on chemical mechanical polishing of W–Ni–Fe alloy. The mechanism of the boundary step generation is illustrated and a model of grain boundary step formation is proposed. The mechanism reveals the effects of mechanical and chemical actions in both surface roughness and material removal. The model was verified by the experiments and the results show that appropriately balancing the mechanical and chemical effects restrains the generation of boundary steps and leads to a fine surface quality with a high removal rate by citric acid-based slurry.

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    Jiang Guo, Xiaolin Shi, Chuanping Song, Lin Niu, Hailong Cui, Xiaoguang Guo, Zhen Tong, Nan Yu, Zhuji Jin, Renke Kang. Theoretical and experimental investigation of chemical mechanical polishing of W–Ni–Fe alloy[J]. International Journal of Extreme Manufacturing, 2021, 3(2): 25103

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    Paper Information

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    Received: Oct. 21, 2020

    Accepted: --

    Published Online: Jan. 10, 2022

    The Author Email: Kang Renke (kangrk@dlut.edu.cn)

    DOI:10.1088/2631-7990/abefb8

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