Chinese Journal of Lasers, Volume. 14, Issue 2, 121(1987)
Experimental study of an adjustable practical preionized ezcimer laser with cycled-flowing gases
The effects of preionisation alit width and different buffer gases on the excimer lasser output are reported A comparison of laser outputs with and without gas cycle has been made.
Tools
Get Citation
Copy Citation Text
Wang Huasheng, Yu Yinshan, Wu Wenghou. Experimental study of an adjustable practical preionized ezcimer laser with cycled-flowing gases[J]. Chinese Journal of Lasers, 1987, 14(2): 121
Paper Information
Category: laser devices and laser physics
Received: Dec. 23, 1985
Accepted: --
Published Online: Aug. 10, 2012
The Author Email:
CSTR:32186.14.
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20