Optical Technique, Volume. 49, Issue 3, 264(2023)
Capturing the motion of laser pulse in photoresist with compressed ultrafast photography
Revealing the motion of laser pulses between photoresists at ultrafast time scales with two-dimensional spatial resolution will help to understand the laser processing and optimize the process. However, most existing imaging technologies for recording the motion of laser pulses in photoresists suffer from the problems such as requiring multiple repeated shots or limited time resolution. To overcome these problems, compressed ultrafast photography (CUP) is proposed to capture the motion of laser pulses in photoresists. The experimental result shows that the motion process of non-repeatable events can be captured with single shot at the time-resolution about 1.54×1011fps, the depth of the imaging sequence reaches hundreds of frames.
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XU Bin, DING Yi, LIU Xinyue, DU ZiHao, ZHAN Xiaojiang, MA Zhao, LI Yingrong. Capturing the motion of laser pulse in photoresist with compressed ultrafast photography[J]. Optical Technique, 2023, 49(3): 264