The pure Ti components are prepared by the laser melting deposition technique with coaxial powder feeding, and the residual stresses in the different regions on the scanning surfaces of samples are measured by the hole-drilling strain method. The effects of laser power, scanning speed and powder feeding rate on the residual stress distributions on the scanning surfaces of samples are also investigated. The research results show that the highest compressive stress appears in the joint area between the deposited component and the substrate and the other areas exhibit the tensile stresses. Moreover, the lowest stress appears at the top area of samples. The residual stress in the joint area between the deposited component and the substrate is strongly dependent on the laser process parameters, while the latter has a slight effect on the residual stress distribution in the top area. The reasonable choice of laser process parameters can effectively reduce the residual stresses of deposited components.