Piezoelectrics & Acoustooptics, Volume. 46, Issue 6, 865(2024)
A High Performance SAW Torque Sensor
Torque measurement is an essential method for assessing whether the output power of a power system meets operational requirements, serving as a critical source of information for equipment operational status and fault pre-warning. Surface Acoustic Waves (SAW) sensors, with their passive and wireless characteristics, are particularly well-suited for torque measurement of rotating shafts, overcoming the challenges in energy and signal transmission encountered with active torque sensors in rotational applications. To achieve high-precision SAW torque sensing, this study focuses on the selection of piezoelectric substrate materials, the design of high-Q resonators, and the development of a high-accuracy frequency demodulation algorithm for SAW sensor echo signals. The designed SAW torque sensor was tested, achieving a load nonlinearity of 0.183%, unload nonlinearity of 0.160%, load repeatability of 0.260%, unload repeatability of 0.103%, and hysteresis of 0.299%, thereby demonstrating high-precision torque sensing capabilities.
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ZHOU Shuo, GAO Zihang, XIAO Qiang, WANG Weibiao, FAN Yanping. A High Performance SAW Torque Sensor[J]. Piezoelectrics & Acoustooptics, 2024, 46(6): 865
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Received: Nov. 2, 2024
Accepted: Feb. 13, 2025
Published Online: Feb. 13, 2025
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