Chinese Optics Letters, Volume. 8, Issue s1, 174(2010)

Multilayer Laue lens for focusing X-ray into nanometer size

Jingtao Zhu, Qiushi Huang, Haochuan Li, Jing Xu, Xiaoqiang Wang, Zhong Zhang, Zhanshan Wang, and Lingyan Chen
Author Affiliations
  • Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092, China
  • show less

    A multilayer Laue lens with a 15-nm outermost zone width is designed for an incident X-ray beam with an energy of 8 keV. WSi2/Si multilayer Laue lens with 324 layers and a total thickness of 7.9 \mu m is successfully fabricated using direct current magnetron sputtering method. After deposition, the multilayer is sliced and polished to achieve the ideal aspect ratio. Characterization results show that the multilayer structure is kept intact and the surface roughness is approximately 0.9 nm after slicing and repeated polishing.

    Tools

    Get Citation

    Copy Citation Text

    Jingtao Zhu, Qiushi Huang, Haochuan Li, Jing Xu, Xiaoqiang Wang, Zhong Zhang, Zhanshan Wang, Lingyan Chen, "Multilayer Laue lens for focusing X-ray into nanometer size," Chin. Opt. Lett. 8, 174 (2010)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Nov. 25, 2009

    Accepted: --

    Published Online: May. 14, 2010

    The Author Email:

    DOI:10.3788/COL201008s1.0174

    Topics