Chinese Optics Letters, Volume. 8, Issue s1, 174(2010)
Multilayer Laue lens for focusing X-ray into nanometer size
A multilayer Laue lens with a 15-nm outermost zone width is designed for an incident X-ray beam with an energy of 8 keV. WSi2/Si multilayer Laue lens with 324 layers and a total thickness of 7.9 \mu m is successfully fabricated using direct current magnetron sputtering method. After deposition, the multilayer is sliced and polished to achieve the ideal aspect ratio. Characterization results show that the multilayer structure is kept intact and the surface roughness is approximately 0.9 nm after slicing and repeated polishing.
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Jingtao Zhu, Qiushi Huang, Haochuan Li, Jing Xu, Xiaoqiang Wang, Zhong Zhang, Zhanshan Wang, Lingyan Chen, "Multilayer Laue lens for focusing X-ray into nanometer size," Chin. Opt. Lett. 8, 174 (2010)
Received: Nov. 25, 2009
Accepted: --
Published Online: May. 14, 2010
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