Chinese Journal of Lasers, Volume. 39, Issue 3, 308001(2012)

Study of Calibrating Algorithm for Wavefront Reference Source of Point Diffraction Interferometer

Zhang Yu1,2、*, Jin Chunshui1, Ma Dongmei1, and Wang Liping1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    In order to improve the measuring accuracy of double fibers point diffraction interferometer, system errors of two wavefront reference sources (WRS) should be calibrated. A calibrating process and calibrating algorithm of WRS are designed. The non-axisymmetric errors of WRS about optical axis are obtained through rotating the tested optical system around optical axis by four times. The non-axisymmetric errors of WRS about oblique axis are obtained through rotating the tested optical system around oblique axis by four times. Then the axisymmetric errors of WRS are gotten by the least squares, and the system errors of WRS are equal to the sum of the axisymmetric errors and non-axisymmetric errors. The process of calibrating algorithm is simulated by computer. When the rotating tolerances of WRS are in the range of ±1°, the root mean square value of measuring error is less than 0.01 nm using the 36 terms of Zernike polynomials, which is in the range of calibrating accuracy. The validity of calibrating algorithm is verified and the rotating tolerances of WRS are given by simulating the calibration.

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    Zhang Yu, Jin Chunshui, Ma Dongmei, Wang Liping. Study of Calibrating Algorithm for Wavefront Reference Source of Point Diffraction Interferometer[J]. Chinese Journal of Lasers, 2012, 39(3): 308001

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    Paper Information

    Category: measurement and metrology

    Received: Oct. 9, 2011

    Accepted: --

    Published Online: Jan. 17, 2012

    The Author Email: Yu Zhang (521zhangyu2008@163.com)

    DOI:10.3788/cjl201239.0308001

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