Chinese Optics Letters, Volume. 11, Issue 2, 022401(2013)
Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides
Surface-plasmon (SP) enhancement of amorphous-silicon-nitride (a-SiNx) light emission with single-layer gold (Au) waveguides is experimentally demonstrated through time-resolved photoluminescence measurement. The a-SiNx active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and the Au waveguide on the top of the a-SiNx layer is fabricated by magnetron sputtering. The maximum Purcell factor value of ~3 is achieved with identified SP resonance of the Au waveguide at ~530 nm.
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Keyong Chen, Xue Feng, Yidong Huang, "Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides," Chin. Opt. Lett. 11, 022401 (2013)
Category: Optics at Surfaces
Received: Aug. 29, 2012
Accepted: Sep. 12, 2012
Published Online: Dec. 20, 2012
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