Chinese Journal of Lasers, Volume. 44, Issue 9, 904001(2017)
Influence and Revising Method of Grating Ruling Engine′s Abbe Error on Quality of Grating Wavefront
Diffracted wavefront quality is one of the important performance indexes of gratings. If there is Abbe error in the grating ruling engine, it will directly affect the positioning accuracy of grooves, thus affecting wavefront quality of gratings. The physical models of the Abbe error and the quality of the grating diffraction wave are established, to analyze the influence of the error on the wavefront quality. Aiming at the Abbe error, a kind of measurement optical path is designed based on dual-frequency laser interferometry, and the influence of Abbe error on diffracted wavefront of the grating is measured and simulated. Furthermore, the error control method based on double-layer grating table structure is proposed. Before and after revising Abbe error, the ruling experiments for two echelle gratings with the size of 80 mm×100 mm and groove density of 79 groove/mm are carried out. The results show that the diffracted wavefront error of the gratings in -36 blaze order is reduced from 0.529λ to 0.159λ (λ=632.8 nm) by the measurement and correction of the Abbe error, which effectively reduces the influence of Abbe error on the quality of grating′s diffracted wavefront.
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Mi Xiaotao, Yu Haili, Yu Hongzhu, Qi Xiangdong, Li Xiaotian, Wan Qiuhua. Influence and Revising Method of Grating Ruling Engine′s Abbe Error on Quality of Grating Wavefront[J]. Chinese Journal of Lasers, 2017, 44(9): 904001
Category: measurement and metrology
Received: Mar. 29, 2017
Accepted: --
Published Online: Sep. 7, 2017
The Author Email: Xiaotao Mi (mixiaotao_ciomp@126.com)