Lead zirconate titanate thin films were successfully prepared on 5-inch TiO_x/Pt/Ti/SiO_2/Si substrates by RF-Magnetron Sputtering method.The experimental results show that the orientation of PZT thin films can be changed from(111) to(100) by precisely controlling the substrate temperature.The (111)-oriented films with thickness of 500nm have the remanent polarization of 20μC/cm~2,dielectric constant of 370,dielectric loss of 1.5%,coercive field of 130kV/cm and pyroelectric coefficient of 1.1×10~(-8)C/cm~2K.The films can be used for fabricating uncooled infrared focal plane detector arrays.