With the development of pulsed power technology, nanosecond pulsed electric field has been gradually applied to plasma water treatment, irreversible electroporation for tumor ablation and other technologies. To meet the application requirements of nanosecond pulses, the power supply is required to output high voltage exceeding 10 kV, with narrow nanosecond pulse width and fast rising edge. At the same time, it is required to reduce the size and the cost. The nanosecond pulse power supply is an inductor-isolated Marx generator, whose circuit can realize modular superposition. Inductive isolation can reduce the number of switches and raise the charging voltage to obtain a higher voltage output. The driving circuit has only one control signal and one DC power supply module, which can control all discharge tubes at the same time after power amplification and magnetic isolation. The driving circuit has the advantages of simple structure, low cost, small volume and high voltage resistance. The power supply has 24 stages. Under the condition of 50 kΩ resistive load, high voltage pulses with 500 ns pulse width, amplitude of 0-14 kV and adjustable frequency of 0.5-1 kHz are generated. The size of the main circuit is only 23 cm×10 cm×12 cm.