High To superconducting Y-Ba-Cu-O film with zero-resistance temperature of 91 K and critical current density of about 105 A/cm2 at 77 K have bsen reproducibly fabricated in situ by plasma-assisted laser ablation method. The SBM micrographs and X-ray diffraction pitterns show that these films are of excellent eptiaxial quality and are oriented mostly with its c-axis perpendicular to the substrate furface.