In order to improve the sensitivity and accuracy of the eddy current sensor, the influence of the excitation frequency and the structural parameters of the probe coil were studied on the performance index of the eddy current sensor. Based on the basic theory of Maxwell electromagnetic field and the finite element analysis method, the equivalent model of the eddy current sensor was simulated on the COMSOL simulation software. The simulation results show that the excitation frequency has the greatest effect on the eddy current distribution. The increase of the excitation frequency increases the eddy current intensity on the surface of the measured conductor, but the detection depth decreases rapidly. When the inner diameter and outer diameter of eddy current probe coil are larger, the thickness is smaller, the sensitivity of eddy current sensor is higher. The research results provide important reference value for the selection of excitation frequency of eddy current sensor in voice coil fast reflection mirror and the optimization design of probe coil structure parameters.