Chinese Journal of Liquid Crystals and Displays, Volume. 40, Issue 9, 1268(2025)

Fabrication of large-aperture liquid crystal polarization gratings by proximity stepper holographic interference splicing exposure

Chen WANG1, Qipeng FANG1、#, Feiyu JIANG1,2, Chengkai LIAO1,2, Xiuhui SUN1, Chao HU1, and Shaoyun YIN1、*
Author Affiliations
  • 1Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
  • 2School of Electronic Science and Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China
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    Large-aperture liquid crystal polarization gratings (LCPGs) hold broad potential applications in beam steering modules due to their advantages of high efficiency and inertia-free operation. However, limited by the aperture of optical components in polarization holographic interference exposure systems, it is challenging to fabricate LCPGs with apertures exceeding 2 in (1 in=2.54 cm) through single exposure. This paper proposes a proximity stepper holographic interference splicing exposure method. By employing a photomask placed in close proximity to the exposure substrate, precise control of single-exposure area positioning is achieved combined with a high-precision displacement stage. Stepper splicing exposure of a 150 mm aperture LCPG is realized. The fabricated grating exhibits a splicing seam of only 26.4 μm and achieves a diffraction efficiency of 96.86%. This paper provides a new idea for the efficient deflection of large-aperture beams.

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    Chen WANG, Qipeng FANG, Feiyu JIANG, Chengkai LIAO, Xiuhui SUN, Chao HU, Shaoyun YIN. Fabrication of large-aperture liquid crystal polarization gratings by proximity stepper holographic interference splicing exposure[J]. Chinese Journal of Liquid Crystals and Displays, 2025, 40(9): 1268

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    Paper Information

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    Received: Jun. 4, 2025

    Accepted: --

    Published Online: Sep. 25, 2025

    The Author Email: Shaoyun YIN (ysy@cigit.ac.cn)

    DOI:10.37188/CJLCD.2025-0113

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