Chinese Journal of Liquid Crystals and Displays, Volume. 40, Issue 9, 1268(2025)
Fabrication of large-aperture liquid crystal polarization gratings by proximity stepper holographic interference splicing exposure
Large-aperture liquid crystal polarization gratings (LCPGs) hold broad potential applications in beam steering modules due to their advantages of high efficiency and inertia-free operation. However, limited by the aperture of optical components in polarization holographic interference exposure systems, it is challenging to fabricate LCPGs with apertures exceeding 2 in (1 in=2.54 cm) through single exposure. This paper proposes a proximity stepper holographic interference splicing exposure method. By employing a photomask placed in close proximity to the exposure substrate, precise control of single-exposure area positioning is achieved combined with a high-precision displacement stage. Stepper splicing exposure of a 150 mm aperture LCPG is realized. The fabricated grating exhibits a splicing seam of only 26.4 μm and achieves a diffraction efficiency of 96.86%. This paper provides a new idea for the efficient deflection of large-aperture beams.
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Chen WANG, Qipeng FANG, Feiyu JIANG, Chengkai LIAO, Xiuhui SUN, Chao HU, Shaoyun YIN. Fabrication of large-aperture liquid crystal polarization gratings by proximity stepper holographic interference splicing exposure[J]. Chinese Journal of Liquid Crystals and Displays, 2025, 40(9): 1268
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Received: Jun. 4, 2025
Accepted: --
Published Online: Sep. 25, 2025
The Author Email: Shaoyun YIN (ysy@cigit.ac.cn)