Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 545(2025)

Design of Integrated Structure Bulk Acoustic Resonator Based on PMN-PT

ZHAO Xinzi1,2, WU Kun2,3, TIAN Mingyu2,3, and JIANG Pingying2,3
Author Affiliations
  • 1School of Information and Communication Engineering,University of Electronic Science and Technology of China,Chengdu 610097,China
  • 2The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China
  • 3NIICAS(Chongqing)Technology Co.,Ltd,Chongqing 401332,China
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    This study is focused on the feasibility of using a novel piezoelectric material PMN-PT,with an electromechanical coupling coefficient of approximately 39.2%,as a piezoelectric material for bulk acoustic wave devices. Based on the air-gap thin film bulk acoustic wave resonator(FBAR),a two-dimensional finite element simulation model of the fused structure FBAR is proposed using the finite-element simulation method. The admittance and Q-value curves of the FBAR,with the aforementioned two structures,are compared via finite-element simulation analysis to verify the clutter suppression and Q-value enhancement ability of the fusion structure for S- and C-band devices. A low-clutter,high-Q-value FBAR based on PMN-PT is designed. The simulation results show that the designed fusion structure can effectively suppress the clutter generated by air-gap FBAR,while increasing the Q-values of S- and C-band devices by 101.8% and 350.4%,respectively.

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    ZHAO Xinzi, WU Kun, TIAN Mingyu, JIANG Pingying. Design of Integrated Structure Bulk Acoustic Resonator Based on PMN-PT[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 545

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    Paper Information

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    Received: Dec. 30, 2024

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.022

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