Piezoelectrics & Acoustooptics, Volume. 45, Issue 6, 866(2023)

Study on Composite Control System for Piezoelectric Ceramic Positioning Platform

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    A composite control system based on feedforward compensation is proposed to address the issue of reducing the accuracy of piezoelectric ceramic positioning platforms due to the inherent hysteresis characteristics of piezoelectric ceramics. Firstly, a feedforward model is established. A segmented Prandtl Ishlinskii model is proposed and applied to increase the fitting accuracy while avoiding complex solving processes,and a hysteresis inverse model with a modeling error rate of up to 0.69% is obtained. Secondly,a series proportional integral (PI) digital circuit,a sinusoidal excitation circuit,and a capacitor conversion circuit were designed for the feedback loop,further improving the control accuracy of the piezoelectric ceramic positioning platform. The test is carried out according to the national test standard GB/T 38614-2020.The measurement results show that the forward repetitive positioning accuracy and reverse repetitive positioning accuracy of the piezoelectric ceramic positioning platform are 0.013 1 μm and 0.015 5 μm,respectively, and the accuracy of the platform is 0.033 5 μm under the control of the designed composite control system. After calculating the reverse difference,the hysteresis error is 0.013%.Compared with the piezoelectric ceramic positioning platform with only feedforward control,the control accuracy has improved by 79.57%.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Composite Control System for Piezoelectric Ceramic Positioning Platform[J]. Piezoelectrics & Acoustooptics, 2023, 45(6): 866

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    Paper Information

    Received: Jun. 5, 2023

    Accepted: --

    Published Online: Jan. 4, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.06.014

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