Chinese Journal of Lasers, Volume. 30, Issue 12, 1111(2003)
Optical and Structural Properties of Oxygen-doped and Annealed Ge-Sb-Te Thin Films
Optical properties of oxygen-doped Ge-Sb-Te thin films prepared by RF-sputtering method in the region of 400~800 nm were studied, including refractive index, extinction coefficient. The results show that optical constants of the Ge-Sb-Te-O films change with oxygen content and heat-treatment. XRD spectra of the films with different oxygen content in the as-deposited and heat-treated states show that the films changed from amorphous to crystalline states due to heat-treatment. The effect of the strain field induced by oxygen-doping on optical properties is discussed.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical and Structural Properties of Oxygen-doped and Annealed Ge-Sb-Te Thin Films[J]. Chinese Journal of Lasers, 2003, 30(12): 1111