This paper investigated the influence of abrasive size, load and spindle speed in grinding process on surface/subsurface damage of Nd-doped phosphate glass experimentally. Results show that the surface roughness is affected little by spindle speed and load. Subsurface damage is much greater in low spindle speed or heavier load. Both surface roughness and subsurface damage are linear to the maximum nominal abrasive size. When the load is doubled, the ratio of subsurface damage to surface roughness increases by 0.05. All the investigating results provide essential foundation for optimizing fabrication techniques of Nd-doped phosphate glass.