Piezoelectrics & Acoustooptics, Volume. 46, Issue 1, 48(2024)
Optical Image Stabilization Platform Based on Piezoelectric Motor
An optical image stabilization platform is designed utilizing the characteristics of fast response, high positioning accuracy and good control performance of piezoelectric motor. The finite element simulation of the motor stator is carried out by COMSOL, and the working principle and response characteristics of the stator are analyzed. The optimum operating frequency and pre-pressure of the motor are measured by experiments, and the relationship among the response speed and the excitation voltage, operating frequency and pre-pressure is analyzed. A variety of control methods are used for positioning test and the high-precision positioning control with error of less than 250 nm has been realized by using a composite control of PID and stepping.
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LI Xing, SHI Yunlai, SUN Haichao, WANG Qiang, LIU Wei. Optical Image Stabilization Platform Based on Piezoelectric Motor[J]. Piezoelectrics & Acoustooptics, 2024, 46(1): 48
Received: Oct. 18, 2023
Accepted: --
Published Online: Jul. 18, 2024
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