Chinese Journal of Lasers, Volume. 26, Issue 9, 815(1999)
Investigation of AlN Thin Films Prepared by Pulsed Excimer Laser Deposition
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Investigation of AlN Thin Films Prepared by Pulsed Excimer Laser Deposition[J]. Chinese Journal of Lasers, 1999, 26(9): 815