In this paper, a hysteresis measurement experiment platform is built to measure the hysteresis effect of a piezoelectric actuator used for LED wafer detection.A piezoelectric hysteresis model based on LSTM neural network is designed, and the hysteresis effect of piezoelectric actuator displacement is modeled by time series prediction method.Comparing the model with the traditional PI model,the experimental results show that the model has better and more extensive hysteresis modeling effect. For sine wave, the displacement prediction accuracy is guaranteed to be within 2%, and for attenuated sine wave, it is guaranteed to be within 3%, which can basically meet the precision requirements of wafer detection in industry.