Chinese Optics Letters, Volume. 8, Issue 12, 1203(2010)
Fabrication and enhanced optical absorption of submicrometer pits array on 6H-SiC via two-beam interference of femtosecond laser
We report the fabrication of submicrometer pits array (SP-array) on 6H-SiC surface by the interference of two femtosecond laser beams. Formation mechanisms and optical absorption of SP-array are studied. The relative reflectivity and transmissivity of white light decrease to 10% of the values of SiC crystal, and the optical absorption is enhanced to 97%. The relative reflectivity and transmissivity of incident angles within the range of 20o~60o are kept below 25%. The enhancement mechanism of optical absorption of the SP-array is also discussed.
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Yi Zhang, Xin Jia, Pingxin Xiong, Tianqing Jia, "Fabrication and enhanced optical absorption of submicrometer pits array on 6H-SiC via two-beam interference of femtosecond laser," Chin. Opt. Lett. 8, 1203 (2010)
Received: Jun. 24, 2010
Accepted: --
Published Online: Dec. 21, 2010
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