In order to optimize the beam parameters further of holographic lithography experiment, based on multi-beam interference theory, the influences of inhomogeneous beam intensity and polarization to the interference patterns are simulated by the two and three linear polarization beams interference quantitatively and qualitatively, respectively. Results show that the structure contrast decreases gradually with the increase of beam polarization difference and intensity heterogeneity. Furthermore, this influence diminishes as the incident angle increasing. The variation of beam polarization and intensity in three beam interference influences wave vector difference, and then alters the lattice shape and structure contrast. Theory guidance is provided to control beam polarization and intensity of holographic interference experiments, which paves a way for the fabrication and optimization of optical micro-structures.