Chinese Journal of Lasers, Volume. 38, Issue 12, 1208005(2011)
Accuracy Analysis on Paraboloid Calibration with Computer-Generated Holography
Aspheric surface test is one of the priority research areas for high precision optical surface measurement. Computer-generated holography (CGH) is an important method to test aspheric surface, but its measurement accuracy is restricted by lots of influent factors. This paper focuses on the error analysis of paraboliod surface test with a corresponding CGH. Measurement errors are calculated by Zemax software. A paraboliod is practically tested by a corresponding CGH, and the mainly measurement errors, such as the CGH substrate′s transmitted wavefront error, coma and sphere a berration are analyzed. The measurement results are compared with confocal ball method. Analytical and experimental results indicate that CGH design and fabrication can achieve very high accuracy. After the calibration of CGH substrate′s transmitted wavefront, the root mean square (RMS) value of theoretic test accuracy is better than 4.2 nm. Defocus of CGH and decentration of paraboloid result in the major measurement error. After fine adjustment, the RMS value of practical measurement error will be better than 4.5 nm.
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Gu Yongqiang, Miao Erlong, Gao Songtao, Sui Yongxin, Yang Huaijiang. Accuracy Analysis on Paraboloid Calibration with Computer-Generated Holography[J]. Chinese Journal of Lasers, 2011, 38(12): 1208005
Category: measurement and metrology
Received: Jul. 8, 2011
Accepted: --
Published Online: Nov. 23, 2011
The Author Email: Yongqiang Gu (yqgu82@gmail.com)