APPLIED LASER, Volume. 45, Issue 3, 159(2025)

Astigmatically Beam Shaping for Femtosecond Laser Direct-Writing of Symmetric Waveguides

Wang Kuan... Li Qianliang, Liu Kexin, Wang Hui, Tao Qing and Liu Dun* |Show fewer author(s)
Author Affiliations
  • Ultrafast laser Processing Research Centre, School of Engineering, Hubei University of Technology, Wuhan 430068, Hubei, China
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    Optical waveguides serve as fundamental components in integrated photonic systems, where minimizing propagation loss and enhancing refractive index modulation are critical for device performance. This study employs astigmatic beam shaping technology to fabricate low-loss optical waveguides in fused quartz (JGS1), systematically investigating the influence of laser parameters on waveguide quality and transmission characteristics. By optimizing laser processing conditions—including single-pulse energy (0.570.60 μJ), scanning speed (15 μm/s), and eight iterative scans—straight waveguides with a propagation loss of 0.231 dB/cm and coupling loss of 0.1 dB/facet were achieved. The fabricated waveguides exhibited high geometric symmetry in cross-sectional profiles and near-field mode circularity of 0.98.

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    Wang Kuan, Li Qianliang, Liu Kexin, Wang Hui, Tao Qing, Liu Dun. Astigmatically Beam Shaping for Femtosecond Laser Direct-Writing of Symmetric Waveguides[J]. APPLIED LASER, 2025, 45(3): 159

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    Paper Information

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    Received: Aug. 5, 2023

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email: Dun Liu (dun.liu@hbut.edu.cn)

    DOI:10.14128/j.cnki.al.20254503.159

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