Chinese Journal of Lasers, Volume. 28, Issue 2, 151(2001)
Characteristics of Sol-gel Dip-coating for Fabricating Microstructure
In order to fabricate sol-gel microoptical elements, characteristics for dip-coating, such as the thickness of the films and the their uniformity, are investigated. Under the low withdrawal rate (<20 cm/min), thickness is linearly related to the square root of the rate. At the high rate (>20 cm/min), thickness increases slowly with the rate, deviating from above relation. An analysis of the dip-coating process shows volatilization of solvent plays a role in characteristics of the films.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Characteristics of Sol-gel Dip-coating for Fabricating Microstructure[J]. Chinese Journal of Lasers, 2001, 28(2): 151