Chinese Journal of Lasers, Volume. 30, Issue 5, 457(2003)

Manufacture and Research of the Linear-source Metal Atom Evaporation Device

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    This paper reported a set of metal atom evaporation device of linear source. The device is composed of the following parts: stainless steel vacuum evaporation cavity, vacuum attaining system, electron gun, crucible, uniform magnetic field, push and pull inner worktable, water cooling system, power supply, measure instrument and control circuit. The device has achieved its primary design targets by several test runs after installing and debugging. The vacuum degree is above 3×10 -3 Pa. The superficial melt area reaches to 22 mm×4 mm to gadolinium metallic material. Many experiments such as the evaporation by the electron gun, ions extraction can be carried out with this device.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Manufacture and Research of the Linear-source Metal Atom Evaporation Device[J]. Chinese Journal of Lasers, 2003, 30(5): 457

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    Paper Information

    Category: laser manufacturing

    Received: Feb. 5, 2002

    Accepted: --

    Published Online: Jun. 27, 2006

    The Author Email: (baocy@mail.tsinghua.edu.cn)

    DOI:

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